Proximity effect correction using a dose compensation curve

Abstract

A new concept, the dose compensation curve, is described for use in a proximity effect correction algorithm. The dose compensation curve links dose compensation factors, developed resist images, and calculated values of energy density at pattern boundaries. An experimentally measured dose compensation curve agrees very well with theoretical predictions. This technique has been successfully implemented in a fast promixity-effect correction algorithm which automatically corrects the exposure dose factor in the electron-beam data base for vector scan machines.