NiSi contact metallization using electroless Ni deposition on Pd-activated self-assembled monolayer (SAM) on p-type Si(100) - Concepedia

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NiSi contact metallization using electroless Ni deposition on Pd-activated self-assembled monolayer (SAM) on p-type Si(100)

14

Citations

6

References

2007

Year

Alla Duhin, Yelena Sverdlov, I. Torchinsky, Yishay Feldman, Yosi Shacham‐Diamand

Microelectronic Engineering

Materials ScienceEngineeringMicrofabricationNanotechnologySurface ScienceApplied PhysicsPd-activated Self-assembled MonolayerSurface EngineeringElectroless Ni DepositionNisi Contact MetallizationSurface ProcessingSilicon On Insulator

References

	Year	Citations

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