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The effect of substrate temperature on the properties of d.c. reactive magnetron sputtered titanium oxide films

Materials ScienceMaterials EngineeringMaterial AnalysisEngineeringOxide ElectronicsSurface ScienceApplied PhysicsSubstrate TemperatureD.c. Reactive MagnetronThin FilmsChemical DepositionThin Film ProcessingTitanium Oxide Films