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Natural SciencesMaterials EngineeringMaterials ScienceCrystal StructureSurface ScienceThin FilmsIon ImplantationOptical Thin FilmsThin Film Surface MorphologyThin-film DepositionThin-film MaterialsFilm DepositionFocused Ion Beam LithographyFocused Ion Beam PatterningPlasma-enhanced DepositionSputter DepositionTexturingThin Film Deposition Materials
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C. P. Wang, M. R. Beasley, T. H. Geballe et al. · Applied Physics Letters · 1997 · 314 citations
Natural Sciences, Materials Engineering, Materials Science +17