IEEE Transactions on Electron Devices · 1969 · 13 citations · 2 references
EngineeringElectrical EngineeringMicroelectronicsSemiconductor DevicesSensorsDisplacement SensorsForce SensingForce SensorsMechanical SensorsMems SensorsStrain SensorsPiezoresistive Force SensorsPiezoresistive SensingPiezoresistive Sensors
A piezoresistive bridge and integrated circuit amplifier can be made in the same silicon cantilever. The purpose of the amplifier is to linearize as well as amplify the output.
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