Device for the determination of spring constants of atomic force microscope cantilevers and micromachined springs

Abstract

We describe a simple device for the calibration of atomic force microscope cantilevers and micromachined springs. The device measures the deflection of the cantilevers in response to known forces that are derived from calibrated macroscopic cantilever springs. We have used the device to determine spring constants from several N/m to tenths of μN/m. On V-shaped and single beam Si3N4 and Si cantilevers, spring constants could be determined to better than 10% with most of the uncertainty coming from uncertainties in the position of the load point.