Applied Surface Science · 1993 · 11 citations · 7 references
Natural SciencesMaterials EngineeringMaterials ScienceElectronic MaterialsSemiconductor MaterialsThin FilmsChemical Vapor DepositionOptical Thin FilmsSemiconductor Device MaterialsSemiconductor Thin FilmsThin-film DepositionThin-film MaterialsChemical Vapor Deposition MaterialsChemical Vapor Deposition PrecursorsMetal-organic Chemical Vapor DepositionMetalorganic Chemical Vapor Deposition
7