Deposition of rutile (TiO2) with preferred orientation by assisted high power impulse magnetron sputtering

TiO2 photocatalysis and related surface phenomena

A FUJISHIMA, Xintong Zhang, Donald A. Tryk · Surface Science Reports · 2008 · 6.5K citations

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II. The energy spectrum of ejected atoms during the high energy sputtering of gold

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High power impulse magnetron sputtering discharge

N. Brenning, Daniel Lundin, Ulf Helmersson · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2012 · 741 citations · Full text

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The energy balance at substrate surfaces during plasma processing

Holger Kersten, H. Deutsch, H. Steffen et al. · Vacuum · 2001 · 353 citations

Natural Sciences, Materials Science, Physics +16

Microstructure modification of amorphous titanium oxide thin films during annealing treatment

Nicolas Martin, C. Rousselot, Daniel Rondot et al. · Thin Solid Films · 1997 · 257 citations

Natural Sciences, Materials Engineering, Materials Science +16