Publication | Closed Access
A micrometer scale and low temperature PZT thick film MEMS process utilizing an aerosol deposition method
50
Citations
20
References
2007
Year
Materials ScienceMaterials EngineeringAerosol Deposition MethodEngineeringMicrofabricationApplied PhysicsMicrometer ScaleMicroelectronicsChemical Vapor DepositionThin Film ProcessingMicro-electromechanical System
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