Concepedia

Xuan-Yu Wang

XW

2

Publications

72

Citations

2

H-Index

2007

Active since

Affiliations

Yuan Ze University(Current)

National Taiwan University

Xuan-Yu Wang is an author at Yuan Ze University specializing in microfabrication, engineering, and applied physics.

Top concepts

EngineeringApplied PhysicsMaterial ScienceMicrofabricationMaterials EngineeringThin FilmsMicrostructureNanofabricationMicroelectronicsNanomanufacturing

Publications per year

2007–2008

2

Publications

2

A micrometer scale and low temperature PZT thick film MEMS process utilizing an aerosol deposition method

Xuan-Yu Wang, Chi‐Yuan Lee, Cheng‐Jien Peng et al. · Sensors and Actuators A Physical · 2007 · 50 citations

Materials Science, Materials Engineering, Aerosol Deposition Method +8

The fabrication of silicon-based PZT microstructures using an aerosol deposition method

Xuan-Yu Wang, Chi‐Yuan Lee, Yuh-Chung Hu et al. · Journal of Micromechanics and Microengineering · 2008 · 22 citations

Engineering, Silicon-based Pzt Microstructures, Mechanical Engineering +20

Rows per page

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