Concepedia

VB-3 noninvasive optical sheet charge density probe for silicon integrated circuits

H. Heinrich, D. M. Bloom, B. R. Hemenway, K.A. McGroddy, U. Keller

IEEE Transactions on Electron Devices · 1986 · 11 citations · 0 references

Concepts

EngineeringElectrical EngineeringMaterials ScienceOptoelectronicsPhotonicsSemiconductor DevicesDevice CharacterizationOptoelectronic DevicesPhotonic Integrated CircuitsSemiconductor Device MaterialsSemiconductor PhysicsSilicon PhotonicsCharge Extraction