International Journal of Machine Tools and Manufacture · 2014 · 345 citations · 23 references
EngineeringManufacturing EngineeringMechanical EngineeringMicroelectromechanical SystemsMicroelectronicsMicrofabricationMems FabricationMicrofabrication ProcessesMicrofluidic Device FabricationMicrofluidic DevicesMicrofluidicsMicrostructure ControlMicroelectromechanical System FabricationMicromillingMicroscale Fabrication
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