Microsensor based on low temperature cofired ceramics and gas-sensitive thin film

Micromachined thin film SnO2 gas sensors in temperature-pulsed operation mode

M. Jaegle, Jürgen Wöllenstein, T Meisinger et al. · Sensors and Actuators B Chemical · 1999 · 74 citations

Engineering, Materials Engineering, Materials Science +13

New design of an SnO2 gas sensor on low temperature cofiring ceramics

Helena Teterycz, Jarosław Kita, Rudolf Bauer et al. · Sensors and Actuators B Chemical · 1998 · 63 citations

Engineering, Materials Engineering, Materials Science +16

Very low power consumption micromachined CO sensors

G. Faglia, Elisabetta Comini, Alessandra Cristalli et al. · Sensors and Actuators B Chemical · 1999 · 54 citations

Engineering, Electrical Engineering, Mechanical Engineering +14

Deposition on micromachined silicon substrates of gas sensitive layers obtained by a wet chemical route: a CO/CH4 high performance sensor

A. Cirera, A. Vilà, A. Cornet et al. · Thin Solid Films · 2001 · 34 citations

Engineering, Materials Engineering, Materials Science +17

Structural transformations of ultra-thin sputtered Pd activator layers on glass and SnO2 surfaces

J. Mizsei, Juha-Veikko Voutilainen, Sami Saukko et al. · Thin Solid Films · 2001 · 19 citations

Natural Sciences, Materials Engineering, Materials Science +14