Thin Solid Films · 2001 · 34 citations · 28 references
EngineeringMaterials EngineeringMaterials ScienceMicrofabricationSensorsThin FilmsChemical SensorsGas SensorsMicrofabrication MaterialsSensor MaterialsSurface MicromachiningThin-film DepositionGas SensingGas Sensor FabricationGas Sensor Surface FunctionalizationMicrofabricated SensorsMicromachined SensorsSemiconductor Gas SensorsSiliconWet Chemical Synthesis
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Microwave Processing of Materials
D. E. Clark, W. H. Sutton · Annual Review of Materials Science · 1996 · 991 citations
Selectivity in semiconductor gas sensors
S. Roy Morrison · Sensors and Actuators · 1987 · 573 citations
Temperature modulation in semiconductor gas sensing
Anna Lee · Sensors and Actuators B Chemical · 1999 · 480 citations · Full text