Solidly mounted thin film electro-acoustic resonator utilizing a conductive Bragg reflector

Modified Butterworth-Van Dyke circuit for FBAR resonators and automated measurement system

John D. Larson, P. Bradley, S.A. Wartenberg et al. · 2000 · 545 citations

Engineering, Electrical Engineering, Circuit Theory +16

High-Q microwave acoustic resonators and filters

K.T. McCarron · IEEE Transactions on Microwave Theory and Techniques · 1993 · 314 citations

Engineering, Electrical Engineering, Materials Science +17

Stress and piezoelectric properties of aluminum nitride thin films deposited onto metal electrodes by pulsed direct current reactive sputtering

M.-A. Dubois, Paul Muralt · Journal of Applied Physics · 2001 · 300 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

HIGH Q MICROWAVE ACOUSTIC RESONATORS AND FILTERS

Elecirodes Piezoelectric · 1993 · 278 citations

Engineering, Electrical Engineering, Materials Science +17

Face-mounted piezoelectric resonators

W.E. Newell · Proceedings of the IEEE · 1965 · 151 citations

Engineering, Electrical Engineering, Materials Science +13