Enhanced antireflecting properties of micro-structured top-flat pyramids

Abstract

This paper aims at modeling bi-periodic micro-structured silicon surfaces exhibiting broadband antireflection properties in the infrared range using Rigorous Coupled-Wave Analysis (RCWA). These structures of pyramidal shape, which typical dimensions are smaller than the wavelength, are not in the Effective Medium Theory (EMT) validity domain. The influence of various opto-geometrical parameters such as period, depth, shape of the pattern is examined. The antireflective properties of such bi-periodic patterned surfaces are then discussed using the photonic crystal theory and photonic band diagrams description. Correlations between the density of Bloch modes, their localizations with respect to the incident medium light line and the surface reflectance are presented.