Concepedia

Publication | Closed Access

The precision implant 9500 plasma flood system — the advanced solution to wafer charging

DOI

11

Citations

3

References

1995

Year

Hiroyuki Ito, T. Kamata, Jonathan England, Ian Fotheringham, F. Plumb, Michael Current
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

References

YearCitations

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