A control approach to cross-coupling compensation of piezotube scanners in tapping-mode atomic force microscope imaging

Abstract

In this article, an approach based on the recently developed inversion-based iterative control (IIC) to cancel the cross-axis coupling effect of piezoelectric tube scanners (piezoscanners) in tapping-mode atomic force microscope (AFM) imaging is proposed. Cross-axis coupling effect generally exists in piezoscanners used for three-dimensional (x-y-z axes) nanopositioning in applications such as AFM, where the vertical z-axis movement can be generated by the lateral x-y axes scanning. Such x/y-to-z cross-coupling becomes pronounced when the scanning is at large range and/or at high speed. In AFM applications, the coupling-caused position errors, when large, can generate various adverse effects, including large imaging and topography distortions, and damage of the cantilever probe and/or the sample. This paper utilizes the IIC technique to obtain the control input to precisely track the coupling-caused x/y-to-z displacement (with sign-flipped). Then the obtained input is augmented as a feedforward control to the existing feedback control in tapping-mode imaging, resulting in the cancellation of the coupling effect. The proposed approach is illustrated through two exemplary applications in industry, the pole-tip recession examination, and the nanoasperity measurement on hard-disk drive. Experimental results show that the x/y-to-z coupling effect in large-range (20 and 45 microm) tapping-mode imaging at both low to high scan rates (2, 12.2 to 24.4 Hz) can be effectively removed.