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Mechanical properties optimization of tungsten nitride thin films grown by reactive sputtering and laser ablation

Materials ScienceMaterials EngineeringEngineeringSurface ScienceMechanical EngineeringApplied PhysicsLaser AblationMechanical Properties OptimizationReactive SputteringThin FilmsPulsed Laser DepositionLaser-assisted DepositionThin Film ProcessingMicrostructure