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Investigation on preparation and physical properties of nanocrystalline Si/SiO2 superlattices for Si-based light-emitting devices

Materials ScienceElectrical EngineeringPhotoluminescenceEngineeringNanoelectronicsApplied PhysicsSemiconductor Device FabricationSi-based Light-emitting DevicesSilicon On InsulatorNanocrystalline MaterialOptoelectronicsNanocrystalline Si/sio2 SuperlatticesPhysical Properties