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EngineeringMaterials EngineeringMaterials ScienceMicroelectromechanical SystemsRheologySensorsMechanical SensorsMems SensorsMicroelectromechanical SensorsMicromachiningVibration MeasurementViscoelastic BehaviorMicrocantilever SensorsMicrofabricated SensorsMicromachined SensorsViscoelasticity SensingViscosity Measurement
10
Proceedings of IEEE Ultrasonics Symposium
1994 · 547 citations
Natural Sciences, Computer Engineering, Petroleum Engineering +16