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Effect of substrate bias voltage on corrosion of TiN/Ti multilayers deposited by magnetron sputtering

Materials EngineeringMaterials ScienceCorrosion ProtectionEngineeringCorrosionSurface ScienceApplied PhysicsMagnetron SputteringSubstrate Bias VoltageTin/ti MultilayersMicroelectronicsDepth-graded Multilayer CoatingCorrosion Resistance