XPS study for reactively sputtered titanium nitride thin films deposited under different substrate bias - Concepedia

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XPS study for reactively sputtered titanium nitride thin films deposited under different substrate bias

140

Citations

20

References

2004

Year

Ning Jiang, H.J. Zhang, Sheng Bao, Y.G. Shen, Zhiqiang Zhou

Physica B Condensed Matter

Materials ScienceEngineeringNanoelectronicsDifferent Substrate BiasSurface ScienceApplied PhysicsChemical Vapor DepositionThin FilmsChemical DepositionXps StudyThin Film Processing

References

	Year	Citations

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