A new fabrication method of low stress PECVD SiNx layers for biomedical applications - Concepedia

Concepedia

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A new fabrication method of low stress PECVD SiNx layers for biomedical applications

22

Citations

22

References

2007

Year

Jiashen Wei, Poh Lam Ong, Francis E. H. Tay, Ciprian Iliescu

Thin Solid Films

Materials ScienceMaterials EngineeringNew Fabrication MethodEngineeringMicrofabricationMaterials FabricationFabrication Technique3D PrintingBiomedical EngineeringBiomedical Applications

References

	Year	Citations

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