Thin Solid Films · 1979 · 78 citations · 11 references
Natural SciencesMaterials EngineeringMaterials ScienceChemical KineticsPhysical ChemistrySemiconductor DevicesChemical Vapor DepositionEpitaxial GrowthKinetic ModelingReactor KineticsReactor ModelingSemiconductor Crystal GrowthChemical Vapor Deposition NucleationFilm Growth MechanismsLow-pressure Chemical Vapor DepositionPolysiliconPolysilicon ProcessingThin-film Growth KineticsVapor Growth
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<i>The Properties of Gases and Liquids</i>
Robert C. Reid, T. K. Sherwood, Robert E. Street · Physics Today · 1959 · 14.2K citations
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Choice Reviews Online · 2001 · 13K citations
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Octave Levenspiel · Industrial & Engineering Chemistry Research · 1999 · 10K citations
D. B. Spalding · International Journal of Heat and Mass Transfer · 1963 · 1.1K citations
Chemical Reaction Engineering.
D.W.T. Rippin · Chemical Engineering Science · 1966 · 422 citations