Influence of sputtering power on properties of ZnO thin films fabricated by RF sputtering in room temperature

Thin-Film Transistor Fabricated in Single-Crystalline Transparent Oxide Semiconductor

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Electrical Engineering, Engineering, Nanoelectronics +14

ZnO-based transparent thin-film transistors

Randy Hoffman, B. Norris, John F. Wager · Applied Physics Letters · 2003 · 1.4K citations

Electrical Engineering, Electronic Devices, Optical Materials +15

Transparent ZnO thin-film transistor fabricated by rf magnetron sputtering

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Thin Film Physics, Engineering, Thin Film Process Technology +18

Structural, optical, and surface acoustic wave properties of epitaxial ZnO films grown on (0112) sapphire by metalorganic chemical vapor deposition

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Wide-bandgap high-mobility ZnO thin-film transistors produced at room temperature

Elvira Fortunato, Pedro Barquinha, Ana Pimentel et al. · Applied Physics Letters · 2004 · 537 citations

Wide-bandgap Semiconductor, Room Temperature, Electrical Engineering +14