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Scanning tunneling microscopy studies of structural disorder and steps on Si surfaces
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1989
Year
EngineeringSilicon On InsulatorMicroscopy ObservationsTunneling MicroscopySiliceneStructural DisorderSi SurfacesSurface ReconstructionMaterials SciencePhysicsDefect FormationSemiconductor Device FabricationMicroelectronicsVicinal SiMicroscopy StudiesScanning Probe MicroscopySurface ScienceApplied PhysicsCondensed Matter PhysicsStep Structure
Scanning tunneling microscopy observations of several forms of disorder on Si surfaces are presented. These include dimer vacancies on Si(001), step bunches associated with a morphological phase transition on vicinal Si(111), and step structure on vicinal Si(001). A recipe for cleaning of Si surfaces to produce a minimum amount of disorder is presented.