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La0.7Sr0.3MnO3 suspended microbridges for uncooled bolometers made using reactive ion etching of the silicon substrates

Materials EngineeringUncooled BolometersElectrical EngineeringEngineeringMicrofabricationApplied PhysicsNano Electro Mechanical SystemSilicon SubstratesReactive Ion EtchingInstrumentationSilicon On InsulatorMicroelectronicsMicro-electromechanical System