Damage-free polishing of monocrystalline silicon wafers without chemical additives

Effect of phase transformations on the shape of the unloading curve in the nanoindentation of silicon

Vladislav Domnich, Yury Gogotsi · Applied Physics Letters · 2000 · 369 citations

Engineering, Mechanical Engineering, Silicon On Insulator +16

Molecular dynamics simulation of phase transformations in silicon monocrystals due to nano-indentation

Wai Chye Cheong, L C Zhang · Nanotechnology · 2000 · 344 citations

Engineering, Material Simulation, Molecular Dynamics Simulation +23

Handbook of Semiconductor Manufacturing Technology

M. Henini · Microelectronics Journal · 2001 · 312 citations

Semiconductors, Electrical Engineering, Engineering +4

Indentation-induced phase transformations in silicon: influences of load, rate and indenter angle on the transformation behavior

Jae‐il Jang, Michael J. Lance, Songqing Wen et al. · Acta Materialia · 2005 · 309 citations

Engineering, Transformation Behavior, Dislocation Interaction +9

Atomic scale deformation in silicon monocrystals induced by two-body and three-body contact sliding

Liangchi Zhang, Hiroaki Tanaka · Tribology International · 1998 · 222 citations

Materials Science, Engineering, Dislocation Interaction +14