Journal of Materials Science · 2008 · 34 citations · 17 references
EngineeringMaterials EngineeringMaterials ScienceElectronic MaterialsMicroelectronicsSemiconductor DevicesIntegrated Circuit DesignIntegrated Circuit DevicesInterconnect TechnologyNanoelectronicsSemiconductor Device MaterialsSemiconductor PhysicsCopper InterconnectsIntermetallic Compound FormationIntermetallic FormationMetal-semiconductor Interfaces
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