Evaluation of surface characteristics of ground CVD-SiC using cast iron bond diamond wheels

Mirror Surface Grinding of Silicon Wafers with Electrolytic In-Process Dressing

H. Ohmori, Tomoyuki Nakagawa · CIRP Annals · 1990 · 331 citations

Engineering, Manufacturing Engineering, Materials Engineering +16

Analysis of Mirror Surface Generation of Hard and Brittle Materials by ELID (Electronic In-Process Dressing) Grinding with Superfine Grain Metallic Bond Wheels

Hitoshi Ohmori, Takeo Nakagawa · CIRP Annals · 1995 · 214 citations

Engineering, Materials Engineering, Materials Science +14

Utilization of Nonlinear Conditions in Precision Grinding with ELID (Electrolytic In-Process Dressing) for Fabrication of Hard Material Components

H. Ohmori, Takeo Nakagawa · CIRP Annals · 1997 · 88 citations

Engineering, Materials Engineering, Materials Science +7

Ultraprecision Surface Grinding of Chemical Vapor Deposited Silicon Carbide for X-Ray Mirrors Using Resinoid-Bonded Diamond Wheels

Yoshiharu Namba, Hiroto Kobayashi, Hirofumi Suzuki et al. · CIRP Annals · 1999 · 38 citations

Natural Sciences, Materials Engineering, Materials Science +11

Fixed abrasive grinding of CVD SiC mirrors

Thomas G. Bifano, Yi Yuan, Keith Kahl · Precision Engineering · 1994 · 32 citations

Engineering, Materials Engineering, Ceramics +10