Nanoscale domain patterning of lead zirconate titanate materials using electron beams

Abstract

The interactions of electron beams (e− beam) with ferroelectric oxides based on lead zirconate titanate have been quantified. The beam energy and dose dependencies of surface charge have been manipulated to influence local polarization orientation. The mechanism of ferroelectric domain polarization of 100 nm grains in lead zirconate titanate is discussed in terms of electron–solid interactions and the relative number of secondary electrons emitted to trapped electrons. Both positive and negative perpendicular polarization can be realized with e− beam exposure. The consequent nanoscale domain patterning is characterized with piezoforce microscopy.