Large Area Direct Fabrication of periodic Arrays using Interference Patterning

Abstract

In this study, we introduce a recently developed approach for the fabrication of two and three dimensional structures using Direct Laser Interference Patterning (DLIP). Different periodic arrays were fabricated on polymers, resists and carbon like layers using a nanosecond pulsed laser system. The fabricated structures range from the submicrometer (∼180 nm) to micrometer (∼10 μm) range, and its resolution (minimal achievable feature size) depends basically on interaction nature of the laser light with the processed material, as well as the utilized wavelength and laser processing parameters. Different examples of fabricated arrays and their applications are discussed.