Water glass bonding

Bonding of silicon wafers for silicon-on-insulator

W. Maszara, Georges Goetz, A.L. Caviglia et al. · Journal of Applied Physics · 1988 · 861 citations

Engineering, Materials Engineering, Materials Science +17

Silicon-to-silicon direct bonding method

Masaru Shimbo, K. Furukawa, K. Fukuda et al. · Journal of Applied Physics · 1986 · 507 citations

Engineering, Materials Engineering, Materials Science +17

Anodic bonding of imperfect surfaces

T. R. Anthony · Journal of Applied Physics · 1983 · 111 citations

Natural Sciences, Materials Engineering, Materials Science +17

Low-temperature silicon-to-silicon anodic bonding with intermediate low melting point glan

Masayoshi Esashi, Akira Nakano, Shuichi Shoji et al. · Sensors and Actuators A Physical · 1990 · 75 citations

Engineering, Materials Engineering, Materials Science +10

Low temperature wafer bonding for micromechanical applications

Hans-Joachim Quenzer, W. Benecke, Claudio Dell' · 1992 · 13 citations

Engineering, Materials Engineering, Materials Science +14