Thermoelectric properties of Al1−xInxN and Al1−y−zGayInzN prepared by radio-frequency sputtering: Toward a thermoelectric power device

Shigeo Yamaguchi, Yasuo Iwamura, Atsushi Yamamoto

Applied Physics Letters · 2003 · 47 citations · 10 references

Concepts

Abstract

With the aim of fabricating a thermoelectric power device using III-nitride semiconductors, we recently studied thermoelectric properties of Al1−xInxN and Al1−y−zGayInzN prepared by rf sputtering. For Al0.35In0.65N with 0.63-μm thickness, the maximum power factor was 3.63×10−4 W/mK2. For Al0.26Ga0.44In0.30N, the maximum power factor was 5.58×10−5 W/mK2.

References

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