Concepedia

Photoresists comparative analysis using soft X-ray synchrotron radiation and time-of-flight mass spectrometry

Luiz A. V. Mendes, Luis Fernando de Ávila, J. W. Menezes, R.R. Pinho, Carlos Lima, Lucila Cescato, Maria Luiza M. Rocco

European Polymer Journal · 2009 · 11 citations · 15 references

DOI

Concepts

References

15

Reevaluation of X-Ray Atomic Energy Levels

J. Bearden, A. F. Burr · Reviews of Modern Physics · 1967 · 2K citations

, , +12

The science and engineering of microelectronic fabrication

Choice Reviews Online · 1996 · 648 citations

, , +17

Stimulated desorption

M. L. Knotek · Reports on Progress in Physics · 1984 · 204 citations

, , +17

Inner-shell excitation and site specific fragmentation of poly(methylmethacrylate) thin film

Marcia C. K. Tinone, Kenichiro Tanaka, Junya Maruyama et al. · The Journal of Chemical Physics · 1994 · 140 citations

, , +17

A low-temperature wafer bonding technique using patternable materials

C-T Pan, Hsiharng Yang, M-C Chou et al. · Journal of Micromechanics and Microengineering · 2002 · 139 citations

, , +17