Study of emission and sputtering yields in some alloys and oxide by glow discharge optical spectrometry: Quantification of analysis

Abstract

Abstract In an analysis by glow discharge optical spectrometry (GDOS) the relation between the intensity of spectral emission of an element and its concentration at the surface of the sample is fundamental for interpreting the results. The different factors which occur in this relation are systematically investigated for different materials such as metallic alloys, oxidized matrices or matrices submitted to ionic implantation. The measurements show that the emission yield of an element is independent of the matrix although particular phenomena can affect the apparent experimental values. The simplification which results in the interpretation of experiments in GDOS is evident and a few examples of applications are presented.