Concepedia
Separations Technology · 1996 · 23 citations · 12 references
EngineeringManufacturing EngineeringManufacturing ProcessesProcess DesignProcess Systems EngineeringCritical Process ParametersProcess EngineeringProcess IntensificationProcess OptimizationProcess Parameter Effects
12
Principles of Zone-Melting
W. G. Pfann · JOM · 1952 · 238 citations
Thermal and stress analysis of semiconductor wafers in a rapid thermal processing oven
H. A. Lord · IEEE Transactions on Semiconductor Manufacturing · 1988 · 192 citations
Engineering, Materials Engineering, Materials Science +17
Lateral epitaxy by seeded solidification for growth of single-crystal Si films on insulators
John C. C. Fan, M. W. Geis, Bor-Yeu Tsaur · Applied Physics Letters · 1981 · 133 citations
Steady-state thermal-solutal diffusion in a float zone
G. W. Young, Arnon Chait · Journal of Crystal Growth · 1989 · 36 citations
Engineering, Earth Sciences, Mechanical Engineering +14
Thermal profiles during recrystallization of silicon on insulator with scanning incoherent light line sources
Katsuhiko Kubota, Charles E. Hunt, Jeffrey Frey · Applied Physics Letters · 1985 · 28 citations
Engineering, Materials Engineering, Materials Science +16