A comparative study of oxygen/organosilicon plasmas and thin SiOxCyHz films deposited in a helicon reactor

Comparison of properties of dielectric films deposited by various methods

W. A. Pliskin · Journal of Vacuum Science and Technology · 1977 · 484 citations

Natural Sciences, Materials Engineering, Materials Science +17

Plasma production using a standing helicon wave

Rod Boswell · Physics Letters A · 1970 · 330 citations

Natural Sciences, Physics, Plasma Physics +7

Synthesis of plasma-polymerized tetraethoxysilane and hexamethyldisiloxane films prepared by atmospheric pressure glow discharge

Yoshihide Sawada, Shuichi Ogawa, Masuhiro Kogoma · Journal of Physics D Applied Physics · 1995 · 219 citations

Natural Sciences, Materials Engineering, Materials Science +15

Thin Organosilicon Films for Integrated Optics

P. K. Tien, G. Smolinsky, R. J. Martin · Applied Optics · 1972 · 190 citations

Natural Sciences, Materials Engineering, Materials Science +15

Mechanisms of plasma polymerization of various silico-organic monomers

Christiane Rau, W. Kulisch · Thin Solid Films · 1994 · 183 citations

Natural Sciences, Chemical Engineering, Materials Science +14