Concepedia

Alternative relationship for converting incremental sheet resistivity measurements into profiles of impurity concentration

Russell Evans, R. P. Donovan

Solid-State Electronics · 1967 · 17 citations · 4 references

DOI

Concepts

References

4

Resistivity of Bulk Silicon and of Diffused Layers in Silicon

J.C. Irvin · Bell System Technical Journal · 1962 · 699 citations

, , +17

Detailed analysis of thin phosphorus-diffused layers in p-type silicon

Eileen Tannenbaum · Solid-State Electronics · 1961 · 211 citations

, , +16

Electron and hole mobilities in inversion layers on thermally oxidized silicon surfaces

Otto Leistiko, Andrew S. Grove, C. T. Sah · IEEE Transactions on Electron Devices · 1965 · 158 citations

, , +17

Studies of anomalous diffusion of impurities in silicon

K. H. Nicholas · Solid-State Electronics · 1966 · 70 citations

, , +12