Concepedia

High rate epitaxial growth of ZnO films on sapphire by planar magnetron rf sputtering system

Tadashi Shiosaki, S. Ohnishi, Yuji Murakami, Akira Kawabata

Journal of Crystal Growth · 1978 · 50 citations · 3 references

DOI

Concepts

References

3

R.f. sputtered epitaxial ZnO films on sapphire for integrated optics

E. L. Paradis, A. J. Shuskus · Thin Solid Films · 1976 · 79 citations

, , +14

Chemical Vapor Deposition of Single-Crystalline ZnO Film with Smooth Surface on Intermediately Sputtered ZnO Thin Film on Sapphire

S. Ohnishi, Yuji Hirokawa, Tadashi Shiosaki et al. · Japanese Journal of Applied Physics · 1978 · 53 citations

, , +14

Scattering in ZnO-Sapphire Optical Waveguides

D. J. Channin, J. M. Hammer, M. T. Duffy · Applied Optics · 1975 · 37 citations

, , +17