Concepedia

Detection and analysis of crystal defects in silicon by scanning infrared depolarization and photoluminescence heterodyne techniques

H.‐D. Geiler, H. Karge, Matthias Wagner, A. Ehlert, E. Daub, K. Messmann

Materials Science and Engineering B · 2002 · 13 citations · 2 references

DOI

Concepts

References

2

Slip-free processing of 300 mm silicon batch wafers

A. Fischer, Hans Richter, W. Kürner et al. · Journal of Applied Physics · 2000 · 28 citations

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Photoelastic Imaging of Process Induced Defects in 300mm-Silicon Wafers

H.‐D. Geiler, W. Kürner, Olaf Storbeck · MRS Proceedings · 1999 · 14 citations

, , +16