Applied Surface Science · 2008 · 79 citations · 24 references
Natural SciencesMaterials EngineeringMaterials ScienceMaterials ChemistrySurface ScienceThin FilmsChemical Vapor DepositionCoatingsThin Film Surface MorphologyThin Film Thermal PropertiesThin-film DepositionThin-film MaterialsPrecursor ChemistryPrecursor DesignPyrolysisSpray PyrolysisThin Oxide FilmsThin-film Growth Mechanisms
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