Concepedia
Ultramicroscopy · 1982 · 12 citations · 11 references
Defect ToleranceRoom TemperatureEngineeringPhysicsApplied PhysicsRadiation-induced DefectsDefect FormationSemiconductor Device FabricationSilicon On InsulatorMicroelectronicsSilicon Debugging
11
The Coulomb Scattering of Relativistic Electrons by Nuclei
William A. McKinley, Herman Feshbach · Physical Review · 1948 · 657 citations
Cross Section, Experimental Nuclear Physics, Nuclear Physics +14
Observation of ion bombardment damage in silicon
D.J. Mazey, R.S. Nelson, R.S. Barnes · Philosophical magazine · 1968 · 221 citations
Materials Science, Abstract Thin Films, Single Crystals +14
Conversion of crystalline germanium to amorphous germanium by ion bombardment
J. R. Parsons · Philosophical magazine · 1965 · 121 citations
Engineering, Siemens Electron Microscope, Radiation Materials Science +16
{113} Loops in electron-irradiated silicon
I. G. Salisbury, M. H. Loretto · Philosophical magazine. A/Philosophical magazine. A. Physics of condensed matter. Structure, defects and mechanical properties · 1979 · 120 citations
Irradiated Silicon, Engineering, Nuclear Physics +12
The dynamic observation of the formation of defects in silicon under electron and proton irradiation
M. D. Matthews, S. J. Ashby · Philosophical magazine · 1973 · 106 citations
Ion Implantation, Engineering, Crystalline Defects +12