Journal of Materials Science · 1979 · 34 citations · 8 references
EngineeringManufacturing EngineeringMaterials ScienceMicroelectronicsSemiconductor DevicesSemiconductor MaterialsIntegrated Circuit DesignIntegrated Circuit FabricationSemiconductor DefectsSemiconductor Device MaterialsSemiconductor ReliabilitySilicon MaterialsSemiconductor Wafer InspectionSilicon DefectsSilicon Wafer ProcessingSilicon WafersWafer Dicing
8