Surface Science · 1988 · 20 citations · 9 references
Natural SciencesMaterials EngineeringMaterials ScienceCeramic MaterialsCeramicsInterface ScienceChemical Vapor DepositionInterface EngineeringInterface ThermodynamicsSemiconductor InterfacesSurface PhysicsThermodynamics Of CeramicsReaction InterfacesSilicon CarbideSilicon Carbide (Sic) Materials
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