An energy analysing electron microscope

Abstract

An instrument is described which combines the facilities of transmission electron microscopy of thin foils with energy analysis of the transmitted electrons in the low-lying loss region. The instrument consists of a standard Siemens electron microscope and a Möllenstedt electron energy analyser placed below the final viewing screen. Energy spectra may be obtained from selected regions of the specimen at high magnification and for operating voltages up to 100 kv. Two examples of the use of such an instrument are given, namely, the study of diffraction contrast effects for inelastically scattered electrons and its use in qualitative microanalysis of specimens containing precipitate phases.