Materials Chemistry and Physics · 2001 · 28 citations · 5 references
Natural SciencesMaterials EngineeringMaterials ScienceMaterials CharacterizationSurface ScienceThin FilmsMetal MaterialsMetalsThin-film DepositionThin-film MaterialsHard CoatingsMetal Thin FilmsMetallic Thin FilmsSputter Deposition
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Properties of reactively sputtered WN x as Cu diffusion barrier
Bong-Seok Suh, Yoon-Jik Lee, Jeongsug Hwang et al. · Thin Solid Films · 1999 · 57 citations
Natural Sciences, Materials Engineering, Materials Science +13