Poly-Si thin film transistors fabricated by combining excimer laser annealing and metal induced lateral crystallization

Phase transformation mechanisms involved in excimer laser crystallization of amorphous silicon films

James S. Im, Hyun Jae Kim, Michael O. Thompson · Applied Physics Letters · 1993 · 528 citations

Materials Engineering, Materials Science, Epitaxial Growth +15

Low temperature poly-Si thin-film transistor fabrication by metal-induced lateral crystallization

Seok-Woon Lee, Seung‐Ki Joo · IEEE Electron Device Letters · 1996 · 453 citations

Materials Science, Materials Engineering, Electrical Engineering +13

High-performance TFTs fabricated by XeCl excimer laser annealing of hydrogenated amorphous-silicon film

K. Sera, Fujio Okumura, Hiroyuki Uchida et al. · IEEE Transactions on Electron Devices · 1989 · 280 citations

Optical Materials, Engineering, Poly-si Thin-film Transistors +21

Nickel induced crystallization of amorphous silicon thin films

Zhonghe Jin, Gururaj A. Bhat, Milton Yeung et al. · Journal of Applied Physics · 1998 · 242 citations

Materials Science, Engineering, Physics +12

Characterization of the MIC/MILC interface and its effects on the performance of MILC thin-film transistors

Man Wong, Zhonghe Jin, Gururaj A. Bhat et al. · IEEE Transactions on Electron Devices · 2000 · 115 citations

Engineering, Metal-induced Lateral Crystallization, Crystal Growth Technology +19