Concepedia

Focused ion beam sputtering yield measurements for cobalt ions on silicon and related materials

P. Schneider, L. Bischoff, J. Teichert, E. Hesse

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1996 · 17 citations · 15 references

DOI

Concepts

References

15

Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline Targets

Peter Sigmund · Physical Review · 1969 · 3.5K citations

, , +13

Collection and sputtering experiments with noble gas ions

O. Almén, G. Bruce · Nuclear Instruments and Methods · 1961 · 417 citations

, , +7

Mesotaxy: Single-crystal growth of buried CoSi2 layers

Alice E. White, K. T. Short, R. C. Dynes et al. · Applied Physics Letters · 1987 · 413 citations

, , +11

High-resolution focused ion beams

Jon Orloff · Review of Scientific Instruments · 1993 · 344 citations

, , +10

Heavy-ion sputtering yield of silicon

H. H. Andersen, H.L. Bay · Journal of Applied Physics · 1975 · 78 citations

, , +13